Ceramic

All ALCHEMIST products are designed to meet the standards required in industrial fields, and based on accumulated technological expertise, our durability, precision, and stability are further enhanced for reliable use.

Ceramic

Yttria, Y₂O₃

The plasma etch rate is significantly lower than that of alumina.
It not only greatly extends component lifespan, but also plays
a critical role in improving yield by maintaining chamber cleanliness.

Specification

Properties	Value
Plasma Etch Rate	Extremely low (excellent protection)
Chemical Stability	Highly resistant to fluorine (F) and chlorine (Cl) gases
Particle Contamination	Minimal corrosion generation, ensuring high cleanliness
Electrical Properties	Excellent electrical insulation, but lower than that of alumina
Machinability	Difficult to sinter; primarily applied as a coating
Application Type	Focus Ring, Chamber Lin

Ceramic

Alumina, Al₂O₃

It maintains excellent electrical insulation even in high-temperature environments, while its superior mechanical strength and wear resistance make it a highly versatile core material that supports the structural stability of semiconductor equipment across various processes.

Specification

Properties	Value
Plasma Etch Rate	Relatively high (rapid erosion)
Chemical Stability	Resistant to acids and alkalis, but vulnerable to fluorine (F)
Particle Contamination	Corrosion-induced contamination
Electrical Properties	Very high dielectric breakdown strength
Machinability	Easy molding and precision polishing
Application Type	Chamber structures and insulating components

Product

Ceramic

Ceramic Overview

Specification

Specification

A global company specializing in semiconductor materials and components