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A global company specializing in
semiconductor materials and components

Product

  • Product
  • SiC

SiC

All ALCHEMIST products are designed to meet the standards required in industrial fields, and based on accumulated technological expertise, our durability, precision, and stability are further enhanced for reliable use.

SiC Overview

SiC is a high-strength material that maintains excellent stability and
corrosion resistance even in high-temperature and intense plasma environments.

By minimizing surface degradation and particle generation, it improves equipment lifespan and process reliability
and is widely applied to core protective parts and highly corrosion-resistant components in semiconductor etching equipment.

SiC

SiC Ring

A core component that controls plasma at the
wafer edge to ensure etching uniformity.
Compared to Si, it is a high-strength material with
superior corrosion resistance.

Specification

Specifications

Ring

Durability

Etcher

Process Uniformity

Single Crystal / Poly Crystal

Replacement Frequency

Focus Ring, Edge Ring, Insert Ring

Main Applications

Ø200 ~ 400 mm


Process

  • Step 01
    제품 공정 이미지
    Rotary
  • Step 02
    제품 공정 이미지
    CNC
  • Step 03
    제품 공정 이미지
    MCT
  • Step 04
    제품 공정 이미지
    Annealing
  • Step 05
    제품 공정 이미지
    oxide cleaning
  • Step 06
    제품 공정 이미지
    inspection
  • Step 07
    제품 공정 이미지
    Packaging
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A global company specializing in semiconductor materials and components