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A global company specializing in
semiconductor materials and components

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  • Synthetic Quartz

Synthetic Quartz

All ALCHEMIST products are designed to meet the standards required in industrial fields, and based on accumulated technological expertise, our durability, precision, and stability are further enhanced for reliable use.

Synthetic Quartz Overview

ALCHEMIST’s synthetic quartz is an ultra-high-purity SiO2 glass material.
With low OH content and excellent purity, it extends material lifespan
and minimizes particle generation, ensuring process stability.

Synthetic Quartz

Etching Parts

ALCHEMIST’s synthetic quartz features high purity and low OH content.
With a high-density structure free of internal bubble defects,
it reduces particle generation during etching processes.

Specification
OH F CI Pb Sn
ppm ppb
EQ#01 ≤1 0.5 976

≤0.1

≤0.1

EQ#02

≤200

3

5

EQ#03

≤1300

100

100

≤1.0 

 ≤1.0 

※ NQ #4 : Natural quartz materials and parts are also supported

Unit : ppb

Item Al Be Ca Co Cr Cu Fe K Li Mg Mn Na Ni Ti V Zn
EQ#01 ≤10 ≤1 ≤10 ≤1 ≤1 ≤1 ≤5 ≤30 ≤1 ≤10 ≤1 ≤15 ≤1 ≤1 ≤1 ≤1
EQ#02 ≤10 ≤1 ≤10 ≤1 ≤1 ≤1 ≤5 ≤30 ≤1 ≤10 ≤1 ≤15 ≤1 ≤1 ≤1 ≤1


Physical Properties

Items Values
Density ( g/cm3 ) 2.2
Coefficient of Thermal Expansion ( x10-7 /K ) 5.5
Softening Point (˚C ) 1.670
Annealing Point (˚C ) 1.210
Strain Point (˚C ) 1.070
Thermal Conductivity(20 ℃ , w/m.k) 1.38


Product Size

Unit : mm

OD ID Thickness Range Tolerance (OD, ID, T) WT Tolerance
370 300 4 ~ 65 ±0.5 ±10.0%
420 330 4 ~ 65 ±0.5 ±10.0%
470 350 4 ~ 65 ±0.5 ±10.0%
520 400 4 ~ 65 ±0.5 ±10.0%

Synthetic Quartz Product Line

Item Focus Ring Single Ring Top Ring GDP LINER Phot Mask
Process Etch Etch Etch CVD CVD Photo
Image

Process

  • Step 01
    제품 공정 이미지
    Rotary
  • Step 02
    제품 공정 이미지
    CNC
  • Step 03
    제품 공정 이미지
    MCT
  • Step 04
    제품 공정 이미지
    Fire Polishing
  • Step 05
    제품 공정 이미지
    Cleaning
  • Step 06
    제품 공정 이미지
    inspection
  • Step 07
    제품 공정 이미지
    Packaging
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A global company specializing in semiconductor materials and components